SOLARIS® Family

The SOLARIS® inline sputter platforms combine experience from 5000+ optical disk systems and 3000+ semiconductor PVD tools to enable ultra‑high‑throughput thin‑film mass production. Designed for fully automated fabs, SOLARIS supports AR coatings, ITO, decorative layers, power device metals and photovoltaic structures.

SOLARIS® S151: For 8‑inch substrates with up to 1200 pcs/hr throughput, ideal for power devices and photovoltaics.
SOLARIS® S380: For 15‑inch substrates enabling high‑volume processing of flexible and rigid materials. 

More info: https://www.evatecnet.com