LLS EVO II

LLS EVO II is a versatile vertical batch sputtering system for metals, dielectrics and magnetic films. Supporting up to five materials and substrate sizes up to 200 × 230 mm, it offers dynamic sputtering, high process purity through load‑chamber degas & etch, configurable power supplies (DC, RF, pulsed) and rapid re‑tooling within minutes. Its compact footprint, flexibility, and lower investment cost make it ideal for smaller volume production or as a complement to single‑wafer platforms. 

More info: https://www.evatecnet.com