1st Industrial Wastewater-to-Semiconductor

The TSMC Southern Taiwan Science Park Water Reclamation Plant located in the Southern Taiwan Science Park, is a reclaimed water plant commissioned by TSMC to CTCI Corporation for investment, design, construction, and a 20 year operation under the Design, Build, Own and Operation (DBOO) model, in order to implement green manufacturing and manage water resource risks.  This project is the world’s first successful reclaimed water plant that recycles industrial wastewater for reuse in semiconductor manufacturing processes, setting a significant milestone for global water resource recycling. It also effectively alleviates the water stress in the Greater Tainan area, making it one of CTCI's benchmark projects for "green engineering."

Project Highlights
Pioneering Diverse Water Resource Solutions to Meet Demand for Semiconductor Processes
This project is the world’s first water reclamation plant to reuse industrial wastewater in semiconductor manufacturing, marking a global milestone in green technological innovation.  The raw water treated by this plant is complex industrial wastewater, containing many small molecules that are difficult to  treat, making it more challenging than treating municipal wastewater. Since the reclaimed water is to be reused in semiconductor manufacturing, which requires extremely high purity—nearly to the level of ultrapure water—there are stringent quality requirements to ensure the stability and yield of precision semiconductor processes.