SOLBERG Vacuum Filtration Solutions

SOLBERG Vacuum Filtration Solutions

Vacuum systems (pumps, filters, and other auxiliary equipment) are crucial for semiconductor and solar cell manufacturing processes including: crystal growing, wafer fabrication, Chemical Vapor Deposition (CVD), and lamination. These processes create by-products ranging from silicon particles to harsh chemical vapors, and when not captured, these contaminants will negatively impact the overall system performance and damage critical components, including the vacuum pumps. Solberg creates high-efficiency vacuum filtration solutions designed for specific semicon process requirements. Purpose built filtration solutions will capture process contaminants, protect the vacuum pump, reduce maintenance costs, and maximize semiconductor tool uptime and product yields.

Vacuum drying & out gassing Systems, Filters, Getters, Purifiers, Catalysts for Gases, Vacuum System Components & Accessories (optical monitors; Sputtering target fixtures; lubricants; pu, Pumps, Vacuum, Contamination Control; HEPA Filtering Systems, Conveying; Material Handling Systems